Evaluation of the effect of FinFET structure parameters on electrical characteristics using TCAD modeling tools
نویسندگان
چکیده
Using TCAD modeling, the effect of changing FinFET structure parameters, such as gate stack layer sizes, rib shape, or doping levels, on electrical characteristics device is investigated.
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ژورنال
عنوان ژورنال: Izvestiâ vysših u?ebnyh zavedenij
سال: 2022
ISSN: ['2072-3040']
DOI: https://doi.org/10.17073/1609-3577-2021-4-222-228